Low temperature deposition of 3D conformal nanocrystalline diamond thin films

• Research unit: INNOSUISSE
• Project number: 16867.2 PFNM-NM

Short description (German)

Low temperature deposition of 3D conformal nanocrystalline diamond thin films

Short description (English)

Low temperature deposition of 3D conformal nanocrystalline diamond thin films

Abstract (German)

An innovative 3D conformal low temperature nano diamond thin film deposition process will be developed.|Plasma diagnosis will be used to optimize the deposition process and nano-mechanical testing procedure|employed to assess the mechanical film properties. Combinatorial lateral gradient thin films technology will|be developed and employed for interface design. Solid-state ì-wave generators will be used for up-scaling|using independent control of multiple microwave sources.

Abstract (English)

An innovative 3D conformal low temperature nano diamond thin film deposition process will be developed.|Plasma diagnosis will be used to optimize the deposition process and nano-mechanical testing procedure|employed to assess the mechanical film properties. Combinatorial lateral gradient thin films technology will|be developed and employed for interface design. Solid-state ì-wave generators will be used for up-scaling|using independent control of multiple microwave sources.