Low temperature deposition of 3D conformal nanocrystalline diamond thin films - Texte

zur Starseite
zur Hauptnavigation
zum Inhalt
zur Suche
zur Hilfe

Schrift Standard Fett
Login

Forschungsstelle

INNOSUISSE

Projektnummer

16867.2 PFNM-NM

Projekttitel

Low temperature deposition of 3D conformal nanocrystalline diamond thin films

Projekttitel Englisch

Low temperature deposition of 3D conformal nanocrystalline diamond thin films

Texte zu diesem Projekt

	Deutsch	Französisch	Italienisch	Englisch
Kurzbeschreibung		-	-
Abstract		-	-

Erfasste Texte

Kategorie	Text
Kurzbeschreibung (Deutsch)	Low temperature deposition of 3D conformal nanocrystalline diamond thin films
Kurzbeschreibung (Englisch)	Low temperature deposition of 3D conformal nanocrystalline diamond thin films
Abstract (Deutsch)	An innovative 3D conformal low temperature nano diamond thin film deposition process will be developed.\|Plasma diagnosis will be used to optimize the deposition process and nano-mechanical testing procedure\|employed to assess the mechanical film properties. Combinatorial lateral gradient thin films technology will\|be developed and employed for interface design. Solid-state ì-wave generators will be used for up-scaling\|using independent control of multiple microwave sources.
Abstract (Englisch)	An innovative 3D conformal low temperature nano diamond thin film deposition process will be developed.\|Plasma diagnosis will be used to optimize the deposition process and nano-mechanical testing procedure\|employed to assess the mechanical film properties. Combinatorial lateral gradient thin films technology will\|be developed and employed for interface design. Solid-state ì-wave generators will be used for up-scaling\|using independent control of multiple microwave sources.