HiFlow - High sensitivity flow sensor for extended flow range

• Unité de recherche: INNOSUISSE
• Numéro de projet: 16862.2 PFNM-NM
• Titre du projet anglais: HiFlow - High sensitivity flow sensor for extended flow range

Description succincte (Allemand)

Machbarkeitsstudie : HiFlow - High Sensitivity Flowsensor for Extended Flow Range

Description succincte (Anglais)

HiFlow - High sensitivity flow sensor for extended flow range

Résumé des résultats (Abstract) (Allemand)

In HiFlow, a compact MEMS based mass flow sensor with ultra low pressure drop, suited for a flow range of at least 30'000 sccm, is developed and demonstrated. In addition, the sensor will be characterised by its high dynamic range, fast response and low noise.

Résumé des résultats (Abstract) (Anglais)

In HiFlow, a compact MEMS based mass flow sensor with ultra low pressure drop, suited for a flow range of at least 30'000 sccm, is developed and demonstrated. In addition, the sensor will be characterised by its high dynamic range, fast response and low noise.