HiFlow - High sensitivity flow sensor for extended flow range - Texts

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Research unit

INNOSUISSE

Project number

16862.2 PFNM-NM

Project title

HiFlow - High sensitivity flow sensor for extended flow range

Texts for this project

	German	French	Italian	English
Short description		-	-
Abstract		-	-

Inserted texts

Category	Text
Short description (German)	Machbarkeitsstudie : HiFlow - High Sensitivity Flowsensor for Extended Flow Range
Short description (English)	HiFlow - High sensitivity flow sensor for extended flow range
Abstract (German)	In HiFlow, a compact MEMS based mass flow sensor with ultra low pressure drop, suited for a flow range of at least 30'000 sccm, is developed and demonstrated. In addition, the sensor will be characterised by its high dynamic range, fast response and low noise.
Abstract (English)	In HiFlow, a compact MEMS based mass flow sensor with ultra low pressure drop, suited for a flow range of at least 30'000 sccm, is developed and demonstrated. In addition, the sensor will be characterised by its high dynamic range, fast response and low noise.