PASS: Particles Free Sealing System

• Unité de recherche: INNOSUISSE
• Numéro de projet: 16181.1 PFNM-NM
• Titre du projet anglais: PASS: Particles Free Sealing System

Description succincte (Allemand)

PASS: Particles Free Sealing System

Description succincte (Anglais)

PASS: Particles Free Sealing System

Résumé des résultats (Abstract) (Allemand)

Aim of project is develop new vacuum valve sealing system which meets the highest particle emission|specifications for sub 20nm node processes. The project has 3 phases: development of new testing|system, understanding the mechanism of particle formation and development of new generation of ¿vacuum valve test bodies¿. The development of the new valves is absolutely necessary for VAT, in order|to maintain leadership and market share in high end markets, specially taken into account the expected transition of microelectronics manufacturing from 300mm to 450mm.

Résumé des résultats (Abstract) (Anglais)