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Research unit
INNOSUISSE
Project number
16181.1 PFNM-NM
Project title
PASS: Particles Free Sealing System

Texts for this project
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Short description
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Abstract
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Inserted texts


CategoryText
Short description
(German)
PASS: Particles Free Sealing System
Short description
(English)
PASS: Particles Free Sealing System
Abstract
(German)
Aim of project is develop new vacuum valve sealing system which meets the highest particle emission|specifications for sub 20nm node processes. The project has 3 phases: development of new testing|system, understanding the mechanism of particle formation and development of new generation of ¿vacuum valve test bodies¿. The development of the new valves is absolutely necessary for VAT, in order|to maintain leadership and market share in high end markets, specially taken into account the expected transition of microelectronics manufacturing from 300mm to 450mm.
Abstract
(English)