High performing PZT thin films for large volume industrial production

• Research unit: INNOSUISSE
• Project number: 15461.1;11 PFNM-NM

Short description (German)

High performing PZT thin films for large volume industrial production

Short description (English)

High performing PZT thin films for large volume industrial production

Abstract (German)

Piezoelectric thin films of PbZrTiO3 (PZT) are very demanded for next generation inkjet printing and further high-volume MEMS components. The market for high-volume PZT thin film deposition systems is now emerging. In this project, PZT thin film sputter processes will be studied in order to optimize the piezoelectric thin film performance in all its aspects, including high electric break down fields, and small leakage currents.

Abstract (English)

Piezoelectric thin films of PbZrTiO3 (PZT) are very demanded for next generation inkjet printing and further high-volume MEMS components. The market for high-volume PZT thin film deposition systems is now emerging. In this project, PZT thin film sputter processes will be studied in order to optimize the piezoelectric thin film performance in all its aspects, including high electric break down fields, and small leakage currents.