High performing PZT thin films for large volume industrial production

• Unité de recherche: INNOSUISSE
• Numéro de projet: 15461.1;11 PFNM-NM
• Titre du projet anglais: High performing PZT thin films for large volume industrial production

Description succincte (Allemand)

High performing PZT thin films for large volume industrial production

Description succincte (Anglais)

High performing PZT thin films for large volume industrial production

Résumé des résultats (Abstract) (Allemand)

Piezoelectric thin films of PbZrTiO3 (PZT) are very demanded for next generation inkjet printing and further high-volume MEMS components. The market for high-volume PZT thin film deposition systems is now emerging. In this project, PZT thin film sputter processes will be studied in order to optimize the piezoelectric thin film performance in all its aspects, including high electric break down fields, and small leakage currents.

Résumé des résultats (Abstract) (Anglais)

Piezoelectric thin films of PbZrTiO3 (PZT) are very demanded for next generation inkjet printing and further high-volume MEMS components. The market for high-volume PZT thin film deposition systems is now emerging. In this project, PZT thin film sputter processes will be studied in order to optimize the piezoelectric thin film performance in all its aspects, including high electric break down fields, and small leakage currents.