Nanobridge ¿ Multiaxis big stroke positioning with nanometer precision - Texts

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Research unit

INNOSUISSE

Project number

14631.1;9 PFNM-NM

Project title

Nanobridge ¿ Multiaxis big stroke positioning with nanometer precision

Texts for this project

	German	French	Italian	English
Short description		-	-
Abstract		-	-

Inserted texts

Category	Text
Short description (German)	Nanobridge - Multiaxis big stroke positioning with nanometer precision
Short description (English)	Nanobridge ¿ Multiaxis big stroke positioning with nanometer precision
Abstract (German)	Multiaxis positioning system with nanometer precision for lithography applications. The project bridges the paradigms of nanotechnology limited to micrometer dimensions with state-of-the-art technology of mechatronic positioning systems for the meter range.
Abstract (English)	Multiaxis positioning system with nanometer precision for lithography applications. The project bridges the paradigms of nanotechnology limited to micrometer dimensions with state-of-the-art technology of mechatronic positioning systems for the meter range.