Thin Probe - Low Noise Thin Integrated 3-Axis Hall Probe

• Research unit: INNOSUISSE
• Project number: 14955.2;5 PFNM-NM

Short description (German)

Thin Probe - Low Noise Thin Integrated 3-Axis Hall Probe

Short description (English)

Thin Probe - Low Noise Thin Integrated 3-Axis Hall Probe

Abstract (German)

Goal of the project is to develop a unique integrated 3-axis Hall probe for high resolution teslameters. The probe chip will be realized in high voltage 0.35ìm CMOS technology, incorporating several vertical and horizontal Hall elements, amplifiers and switches. The new concept with improved spinning-current technique shall result in exeptionally low noise. A novel advanced packaging shall eneable for the smallest Hall probe on the market with highest spatial resolution

Abstract (English)

Goal of the project is to develop a unique integrated 3-axis Hall probe for high resolution teslameters. The probe chip will be realized in high voltage 0.35ìm CMOS technology, incorporating several vertical and horizontal Hall elements, amplifiers and switches. The new concept with improved spinning-current technique shall result in exeptionally low noise. A novel advanced packaging shall eneable for the smallest Hall probe on the market with highest spatial resolution