Black SU-8 photoresist optimizations for different microfabrication processes to a quick market delivery.

• Unité de recherche: INNOSUISSE
• Numéro de projet: 13613.1;4 PFFLM-NM
• Titre du projet anglais: Black SU-8 photoresist optimizations for different microfabrication processes to a quick market delivery.

Description succincte (Anglais)

Black SU-8 photoresist optimizations for different microfabrication processes to a quick market delivery.

Description succincte (Français)

Black SU-8 photoresist optimizations for different microfabrication processes to a quick market delivery.

Résumé des résultats (Abstract) (Anglais)

Gersteltec and the Powder Technology Laboratory work have developed a black SU-8 photoresist during a CTI project. That product needs to be optimized for different techniques of microfabrication before its near commercialisation. A synergy between the black photoresists and the microfabrication techniques has to be investigated to propose in a short period a product to a technique of deposition and structuration. The objectives are to qualify the product for mass production and to make some recommendations of use for customers.

Résumé des résultats (Abstract) (Français)

Gersteltec and the Powder Technology Laboratory work have developed a black SU-8 photoresist during a CTI project. That product needs to be optimized for different techniques of microfabrication before its near commercialisation. A synergy between the black photoresists and the microfabrication techniques has to be investigated to propose in a short period a product to a technique of deposition and structuration. The objectives are to qualify the product for mass production and to make some recommendations of use for customers.