Development of a high mass resolution secondary ion mass spectrometer as an accessory for focused ion beam instruments

• Research unit: INNOSUISSE
• Project number: 13300.1;6 PFFLM-NM

Short description (German)

Development of a high mass resolution secondary ion mass spectrometer as an accessory for focused ion beam instruments

Short description (English)

Development of a high mass resolution secondary ion mass spectrometer as an accessory for focused ion beam instruments

Abstract (German)

Users of focused ion beams (FIBs) and SEM/FIB instruments require chemical or isotopic information that can not be obtained using techniques such as EDX or MALDI because the spatial scale is too small or the specificity or sensitivity insufficient. Secondary ion mass spectrometry can address this demand, but is very expensive; we will change this by introducing a high-performance SIMS module similar in footprint and physical interface requirements to an EDX module. One potential market for this instrument is the study of labeled tissue sections.

Abstract (English)

Users of focused ion beams (FIBs) and SEM/FIB instruments require chemical or isotopic information that can not be obtained using techniques such as EDX or MALDI because the spatial scale is too small or the specificity or sensitivity insufficient. Secondary ion mass spectrometry can address this demand, but is very expensive; we will change this by introducing a high-performance SIMS module similar in footprint and physical interface requirements to an EDX module. One potential market for this instrument is the study of labeled tissue sections.