SEM integrated gas injection system for local three dimensional focused electron and ion beam CVD at nanometre scale

• Research unit: INNOSUISSE
• Project number: 10710.1;8 PFNM-NM

Short description (German)

SEM integrated gas injection system for local three dimensional focused electron and ion beam CVD at nanometre scale

Short description (English)

SEM integrated gas injection system for local three dimensional focused electron and ion beam CVD at nanometre scale

Abstract (German)

The goal of this project is to develop a miniaturized, modular gas injection system, which can supply metalorganic or other molecule flux at high density but low throughput for local chemical reactions. This gas injection system will be integrated into a high-vacuum chamber of a SEM (scanning electron microscope), FIB (scanning ion microscope) and dual (scanning electron and ion) beam microscope (EU MNT ERANET Project NanoGnome). The commercial goal is to offer a low-cost, highly flexible add on tool, which will upgrade such instruments to a workbench for manifold applications in micro- and nanotechnology. The GIS system will be directly sold by Alemnis as standalone solution and as fixed integrated tool in collaboration with a SEM / FIB supplier (TESCAN).

Abstract (English)

The goal of this project is to develop a miniaturized, modular gas injection system, which can supply metalorganic or other molecule flux at high density but low throughput for local chemical reactions. This gas injection system will be integrated into a high-vacuum chamber of a SEM (scanning electron microscope), FIB (scanning ion microscope) and dual (scanning electron and ion) beam microscope (EU MNT ERANET Project NanoGnome). The commercial goal is to offer a low-cost, highly flexible add on tool, which will upgrade such instruments to a workbench for manifold applications in micro- and nanotechnology. The GIS system will be directly sold by Alemnis as standalone solution and as fixed integrated tool in collaboration with a SEM / FIB supplier (TESCAN).