Ultra Low Pressure Sensor ULOPS Feasibility Study

• Unité de recherche: INNOSUISSE
• Numéro de projet: 10786.1;4 PFNM-NM
• Titre du projet anglais: Ultra Low Pressure Sensor ULOPS Feasibility Study

Description succincte (Allemand)

Ultra Low Pressure Sensor ULOPS Feasibility Study

Description succincte (Anglais)

Ultra Low Pressure Sensor ULOPS Feasibility Study

Résumé des résultats (Abstract) (Allemand)

With this feasibility study the project partners will show a novel concept of measuring ultra low pressure in the range of 0-50 Pa with good accuracy and position insensitivity for handheld applications in mainly medical devices. The concept consists in LTCC ceramic cantilever piezoresistive force sensor combined with an enforced polymer membrane.