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Research unit
INNOSUISSE
Project number
10786.1;4 PFNM-NM
Project title
Ultra Low Pressure Sensor ULOPS Feasibility Study

Texts for this project
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Short description
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Abstract
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CategoryText
Short description
(German)
Ultra Low Pressure Sensor ULOPS Feasibility Study
Short description
(English)
Ultra Low Pressure Sensor ULOPS Feasibility Study
Abstract
(German)
With this feasibility study the project partners will show a novel concept of measuring ultra low pressure in the range of 0-50 Pa with good accuracy and position insensitivity for handheld applications in mainly medical devices. The concept consists in LTCC ceramic cantilever piezoresistive force sensor combined with an enforced polymer membrane.