The project Bubble Detection (hereafter named BUD) aims at developing a sensor detecting bubbles to be integrated into an existing flowmeter for semiconductor applications

• Research unit: INNOSUISSE
• Project number: 10705.2;7 PFNM-NM

Short description (German)

The project Bubble Detection (hereafter named BUD) aims at developing a sensor detecting bubbles to be integrated into an existing flowmeter for semiconductor applications

Short description (English)

The project Bubble Detection (hereafter named BUD) aims at developing a sensor detecting bubbles to be integrated into an existing flowmeter for semiconductor applications

Abstract (German)

The aim of this project is two-fold: to develop a fast response bubble detector which both detects the presence of microbubbles and evaluates their size, and to integrate this bubble detector into a non-invasive, non-intrusive, contact-less laser-based flowmeter for dispensing extremely high purity, microbubble-free liquids for high-resolution (sub- 100 nm) wafer fabrication. The combined instrument will enable effective elimination of bubble-induced defects in the thin photoresist layers spun on silicon wafers.

Abstract (English)

The aim of this project is two-fold: to develop a fast response bubble detector which both detects the presence of microbubbles and evaluates their size, and to integrate this bubble detector into a non-invasive, non-intrusive, contact-less laser-based flowmeter for dispensing extremely high purity, microbubble-free liquids for high-resolution (sub- 100 nm) wafer fabrication. The combined instrument will enable effective elimination of bubble-induced defects in the thin photoresist layers spun on silicon wafers.