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Research unit
INNOSUISSE
Project number
9772.1;6 PFNM-NM
Project title
Ultra-soft thin-film magnetic field concentrators for magnetic silicon-sensor applications

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Short description
(English)
Ultra-soft thin-film magnetic field concentrators for magnetic silicon-sensor applications
Abstract
(English)
For the Integrated Magnetic Concentrators (IMCs) of Si Hall-sensors we will develop a magnetron sputtering process to replace the existing glued melt-spun ribbon process. The new process will increase the yield and device performance, and put new applications in reach of the IMC technology. Sensor producer Sentron / Melexis and its partner Axetris, collaborating with Empa, will implement its results in their production to improve competitiveness in existing markets and grow into new ones.