Flywheel Gyroscope: levitated rotating MEMS for high sensitivity multi-axis gyroscope and multifunctional accelerometer

• Unité de recherche: INNOSUISSE
• Numéro de projet: 9861.1;3 PFNM-NM
• Titre du projet anglais: Flywheel Gyroscope: levitated rotating MEMS for high sensitivity multi-axis gyroscope and multifunctional accelerometer

Description succincte (Allemand)

Flywheel Gyroscope: levitated rotating MEMS for high sensitivity multi-axis gyroscope and multifunctional accelerometer

Description succincte (Anglais)

Flywheel Gyroscope: levitated rotating MEMS for high sensitivity multi-axis gyroscope and multifunctional accelerometer

Résumé des résultats (Abstract) (Allemand)

The goal of this project is to develop a system-level model for mixed-domain simulation of a next generation inertial sensor system. The proposed sensor system is a multiple axis accelerometer and gyroscope based on electrostatic levitation of a disc shaped proof mass. The electrostatic suspension and high rotational speed of the disc enable the integration of improved sensitivity and resolution sensing in 6 degrees of freedom in one sensor device. Such an inertial sensor would represent a significant improvement concerning system performance and cost. The model developed during the project will allow to secure the realization of a future prototype by verifying key design and device operating parameters.

Résumé des résultats (Abstract) (Anglais)

The goal of this project is to develop a system-level model for mixed-domain simulation of a next generation inertial sensor system. The proposed sensor system is a multiple axis accelerometer and gyroscope based on electrostatic levitation of a disc shaped proof mass. The electrostatic suspension and high rotational speed of the disc enable the integration of improved sensitivity and resolution sensing in 6 degrees of freedom in one sensor device. Such an inertial sensor would represent a significant improvement concerning system performance and cost. The model developed during the project will allow to secure the realization of a future prototype by verifying key design and device operating parameters.