Flywheel Gyroscope: levitated rotating MEMS for high sensitivity multi-axis gyroscope and multifunctional accelerometer

• Forschungsstelle: INNOSUISSE
• Projektnummer: 9861.1;3 PFNM-NM
• Projekttitel Englisch: Flywheel Gyroscope: levitated rotating MEMS for high sensitivity multi-axis gyroscope and multifunctional accelerometer

Kurzbeschreibung (Deutsch)

Flywheel Gyroscope: levitated rotating MEMS for high sensitivity multi-axis gyroscope and multifunctional accelerometer

Kurzbeschreibung (Englisch)

Flywheel Gyroscope: levitated rotating MEMS for high sensitivity multi-axis gyroscope and multifunctional accelerometer

Abstract (Deutsch)

The goal of this project is to develop a system-level model for mixed-domain simulation of a next generation inertial sensor system. The proposed sensor system is a multiple axis accelerometer and gyroscope based on electrostatic levitation of a disc shaped proof mass. The electrostatic suspension and high rotational speed of the disc enable the integration of improved sensitivity and resolution sensing in 6 degrees of freedom in one sensor device. Such an inertial sensor would represent a significant improvement concerning system performance and cost. The model developed during the project will allow to secure the realization of a future prototype by verifying key design and device operating parameters.

Abstract (Englisch)

The goal of this project is to develop a system-level model for mixed-domain simulation of a next generation inertial sensor system. The proposed sensor system is a multiple axis accelerometer and gyroscope based on electrostatic levitation of a disc shaped proof mass. The electrostatic suspension and high rotational speed of the disc enable the integration of improved sensitivity and resolution sensing in 6 degrees of freedom in one sensor device. Such an inertial sensor would represent a significant improvement concerning system performance and cost. The model developed during the project will allow to secure the realization of a future prototype by verifying key design and device operating parameters.