Demonstration of nanostructures for 1 Tbit/in2 data storage devices through achromatic spatial frequency multiplication using extreme ultraviolet light (Discovery Project)

• Unité de recherche: INNOSUISSE
• Numéro de projet: 8540.1;4 DCPP-NM
• Titre du projet anglais: Demonstration of nanostructures for 1 Tbit/in2 data storage devices through achromatic spatial frequency multiplication using extreme ultraviolet light (Discovery Project)

Description succincte (Anglais)

Demonstration of nanostructures for 1 Tbit/in2 data storage devices through achromatic spatial frequency multiplication using extreme ultraviolet light (Discovery Project)

Résumé des résultats (Abstract) (Anglais)

The hard disk industry has been increasing the aerial data storage density on thin magnetic films at an impressive rate of 60-100% annually. This trend is now approaching a physical constraint called the superparamagnetic effect that limits the maximum data storage density. Patterned magnetic media, where each bit is stored in a lithographically defined magnetic structure, is pursued by the industry to overcome this limit. This project aims to develop a solution for the fabrication of such storage media through a new method that is based on exposures with extreme ultraviolet light.