New materials for thin-film Bulk Acoustic Wave (BAW) devices

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Identifiant

Unité de recherche

INNOSUISSE

Numéro de projet

7925.1;10 NMPP-NM

Titre du projet

New materials for thin-film Bulk Accoustic Wave (BAW) devices

Titre du projet anglais

New materials for thin-film Bulk Accoustic Wave (BAW) devices

Textes relatifs à ce projet

	Allemand	Français	Italien	Anglais
Description succincte	-	-	-
Résumé des résultats (Abstract)	-	-	-

Textes saisis

Catégorie	Texte
Description succincte (Anglais)	New materials for thin-film Bulk Acoustic Wave (BAW) devices
Résumé des résultats (Abstract) (Anglais)	AlN is the material of choice for industrial fabrication of BAW devices, with robust and reproducible PVD deposition solutions now on the market. However, the need for another piezoelectric material exhibiting larger coupling coefficient is already emerging in the industry in order to address wider bandwidth filtering requirements of future wireless applications. It is believed that PZT (PbZrxTi1-xO3) is one of the best material candidate in order to fulfill the requirements of high electromechanical coupling and acoustic quality factor as well as compatibility with volume manufacturing using available system platforms. The objective of the project is to develop the process of PZT PVD sputtering from ceramic target and validate the acoustic properties of the PZT thin-film with bulk acoustic wave resonator and filter vehicles.

Catégorie

Texte

Description succincte
(Anglais)

New materials for thin-film Bulk Acoustic Wave (BAW) devices

Résumé des résultats (Abstract)
(Anglais)

AlN is the material of choice for industrial fabrication of BAW devices, with robust and reproducible PVD deposition solutions now on the market. However, the need for another piezoelectric material exhibiting larger coupling coefficient is already emerging in the industry in order to address wider bandwidth filtering requirements of future wireless applications. It is believed that PZT (PbZrxTi1-xO3) is one of the best material candidate in order to fulfill the requirements of high electromechanical coupling and acoustic quality factor as well as compatibility with volume manufacturing using available system platforms. The objective of the project is to develop the process of PZT PVD sputtering from ceramic target and validate the acoustic properties of the PZT thin-film with bulk acoustic wave resonator and filter vehicles.