Abstract
(English)
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This project covers several steps to develop Membrane RF-Filters as a common effort between the
NTB, Uni. Neuchâtel (IMT) and RMT. Based on a first technology evaluation the partners take over a
silicon micro machined device layout. Several process steps have to be redeveloped to an industrial
standard and some new process steps to be adapted for better manufacturability and a new material
introduced for the control of Thin Films tension. The outcome is a new class of RF ¿ device which
enables the industrial partner to provide first samples for marketing activities.
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