PENMATCH: Development of a -stictionless micro air valve

• Research unit: INNOSUISSE
• Project number: 6986.3;8 NMPP-NM

Short description (English)

PENMATCH: Development of a -stictionless micro air valve

Short description (French)

PENMATCH: Development of a -stictionless micro air valve

Abstract (English)

The goal of the project is to develop air valves that significantly reduce the stiction problems associated with them. The approach taken in this project will use a surface modification of the contact surface by diamond deposition techniques. This deposition requires a modification of the valve structure from a horizontal one to a vertical one in order to allow the deposition of the diamond.

Abstract (French)

The goal of the project is to develop air valves that significantly reduce the stiction problems associated with them. The approach taken in this project will use a surface modification of the contact surface by diamond deposition techniques. This deposition requires a modification of the valve structure from a horizontal one to a vertical one in order to allow the deposition of the diamond.