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Unité de recherche
INNOSUISSE
Numéro de projet
7152.1;6 NMPP-NM
Titre du projet
Digital Holographic Microscopy: Development of a Dual Wavelength Instrument for Roughness Measurement
Titre du projet anglais
Digital Holographic Microscopy: Development of a Dual Wavelength Instrument for Roughness Measurement

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Résumé des résultats (Abstract)
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Textes saisis


CatégorieTexte
Description succincte
(Anglais)
Digital Holographic Microscopy: Development of a Dual Wavelength Instrument for Roughness Measurement
Résumé des résultats (Abstract)
(Anglais)
Digital holographic microscopy (DHM) is a new technology for optical imaging and metrology, which enables high resolution (1 nanometer vertical), three-dimensional (3D) imaging of microscopic samples, with unrivalled performances in terms of speed and ease of use.. Current commercial DHM operate at a single wavelength. This restricts, except for some specific samples, the absolute vertical measurement range to dimensions comparable to half the wavelength of the operating source. The goal of this project is to develop a dual wavelength instrument enabling to extend this range to several micrometers. This will consequently enlarge drastically the DHM market. This technology will be first applied to develop a commercial instrument for surface analysis.