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Forschungsstelle
INNOSUISSE
Projektnummer
7152.1;6 NMPP-NM
Projekttitel
Digital Holographic Microscopy: Development of a Dual Wavelength Instrument for Roughness Measurement
Projekttitel Englisch
Digital Holographic Microscopy: Development of a Dual Wavelength Instrument for Roughness Measurement

Texte zu diesem Projekt

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Kurzbeschreibung
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Abstract
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Erfasste Texte


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Kurzbeschreibung
(Englisch)
Digital Holographic Microscopy: Development of a Dual Wavelength Instrument for Roughness Measurement
Abstract
(Englisch)
Digital holographic microscopy (DHM) is a new technology for optical imaging and metrology, which enables high resolution (1 nanometer vertical), three-dimensional (3D) imaging of microscopic samples, with unrivalled performances in terms of speed and ease of use.. Current commercial DHM operate at a single wavelength. This restricts, except for some specific samples, the absolute vertical measurement range to dimensions comparable to half the wavelength of the operating source. The goal of this project is to develop a dual wavelength instrument enabling to extend this range to several micrometers. This will consequently enlarge drastically the DHM market. This technology will be first applied to develop a commercial instrument for surface analysis.