High temperature optical pressure sensors based on sapphire

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Forschungsstelle

INNOSUISSE

Projektnummer

7814.1;4 NMPP-NM

Projekttitel

High temperature optical pressure sensors based on sapphire

Projekttitel Englisch

High temperature optical pressure sensors based on sapphire

Texte zu diesem Projekt

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Erfasste Texte

Kategorie	Text
Kurzbeschreibung (Englisch)	High temperature optical pressure sensors based on sapphire
Abstract (Englisch)	In a close collaboration with Inficon AG, Balzers, a novel high temperature optical pressure sensor, based on sapphire, will be developed. This new generation of pressure sensors has its field of application in a measurement environment of up to 300°C. The high temperature application requires a novel sensing unit based on optical interferometry. Capacitive measurement ¿ as used in Inficon¿s pressure sensors today ¿ is very sensitive to electro-magnetic and thermal noise, and can not be applied for high temperature pressure sensing. Beside the implementation of a novel sensing unit also the membrane material of the sensors will be replaced. The disadvantages of Al2O3 membranes have been discussed in the preceding feasibility study KTI 7296.1 Sapphire membranes for pressure sensors. All the results gained in the feasibility study will be used for the design and packaging issues for this new generation of pressure sensors.

Kategorie

Text

Kurzbeschreibung
(Englisch)

High temperature optical pressure sensors based on sapphire

Abstract
(Englisch)

In a close collaboration with Inficon AG, Balzers, a novel high temperature optical pressure sensor, based on sapphire, will be developed. This new generation of pressure sensors has its field of application in a measurement environment of up to 300°C. The high temperature application requires a novel sensing unit based on optical interferometry. Capacitive measurement ¿ as used in Inficon¿s pressure sensors today ¿ is very sensitive to electro-magnetic and thermal noise, and can not be applied for high temperature pressure sensing. Beside the implementation of a novel sensing unit also the membrane material of the sensors will be replaced. The disadvantages of Al2O3 membranes have been discussed in the preceding feasibility study KTI 7296.1 Sapphire membranes for pressure sensors. All the results gained in the feasibility study will be used for the design and packaging issues for this new generation of pressure sensors.