Digital Servo Accelerometer

• Forschungsstelle: INNOSUISSE
• Projektnummer: 7472.2;5 NMPP-NM
• Projekttitel Englisch: Digital Servo Accelerometer

Kurzbeschreibung (Englisch)

Digital Servo Accelerometer

Abstract (Englisch)

This project aims at a digital servo technology for high performance accelerometers. The core of the project is the development of an ASIC for silicon based capacitive accelerometers. The existing sensor design is adapted and complete demonstrator accelerometers are realized and tested. The digital servo technology uses a sigma delta loop, integrating the electromechanical accelerometer sensor. The goal is a robust accelerometer with >20 bit output, an offset stability < 10-5 of the working range and a manufacturing cost < 100 CHF