Silicon Carbide High-Temperature Pressure Sensor SICAPS

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INNOSUISSE

Project number

8448.2;7 NMPP-NM

Project title

Silicon Carbide High-Temperature Pressure Sensor SICAPS

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Category	Text
Short description (English)	High-Temperature Pressure Sensor
Abstract (English)	This project addresses the issue of high-temperature pressure sensing in harsh environments, for application in gas turbines and aero-engines. The aim is to develop piezoresistive silicon carbide (SiC) pressure sensors, which allow a high degree of miniaturisation, while having excellent high-temperature stability. To this end, a new technology platform including SiC MEMS (University of Neuchâtel), high-temperature ceramic packaging (Swiss Federal Institute of Technology Lausanne) and sensor mechanical housing (Vibro-Meter SA) will be built up.

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Text

Short description
(English)

High-Temperature Pressure Sensor

Abstract
(English)

This project addresses the issue of high-temperature pressure sensing in harsh environments, for application in gas turbines and aero-engines. The aim is to develop piezoresistive silicon carbide (SiC) pressure sensors, which allow a high degree of miniaturisation, while having excellent high-temperature stability. To this end, a new technology platform including SiC MEMS (University of Neuchâtel), high-temperature ceramic packaging (Swiss Federal Institute of Technology Lausanne) and sensor mechanical housing (Vibro-Meter SA) will be built up.