High-Temperature Pressure Sensor

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INNOSUISSE

Projektnummer

8448.2;7 NMPP-NM

Projekttitel

High-Temperature Pressure Sensor

Projekttitel Englisch

Silicon Carbide High-Temperature Pressure Sensor SICAPS

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Texte zu diesem Projekt

	Deutsch	Französisch	Italienisch	Englisch
Kurzbeschreibung	-	-	-
Abstract	-	-	-

Erfasste Texte

Kategorie	Text
Kurzbeschreibung (Englisch)	High-Temperature Pressure Sensor
Abstract (Englisch)	This project addresses the issue of high-temperature pressure sensing in harsh environments, for application in gas turbines and aero-engines. The aim is to develop piezoresistive silicon carbide (SiC) pressure sensors, which allow a high degree of miniaturisation, while having excellent high-temperature stability. To this end, a new technology platform including SiC MEMS (University of Neuchâtel), high-temperature ceramic packaging (Swiss Federal Institute of Technology Lausanne) and sensor mechanical housing (Vibro-Meter SA) will be built up.

Kategorie

Text

Kurzbeschreibung
(Englisch)

High-Temperature Pressure Sensor

Abstract
(Englisch)

This project addresses the issue of high-temperature pressure sensing in harsh environments, for application in gas turbines and aero-engines. The aim is to develop piezoresistive silicon carbide (SiC) pressure sensors, which allow a high degree of miniaturisation, while having excellent high-temperature stability. To this end, a new technology platform including SiC MEMS (University of Neuchâtel), high-temperature ceramic packaging (Swiss Federal Institute of Technology Lausanne) and sensor mechanical housing (Vibro-Meter SA) will be built up.