Ion Assisted Sputter Deposition of high precision multilayer coatings for UV optics

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Identifiant

Unité de recherche

INNOSUISSE

Numéro de projet

7336.1;7 EPRP-IW

Titre du projet

Ion Assisted Sputter Deposition of high precision multilayer coatings for UV optics

Titre du projet anglais

Ion Assisted Sputter Deposition of high precision multilayer coatings for UV optics

Textes relatifs à ce projet

	Allemand	Français	Italien	Anglais
Description succincte	-	-	-
Résumé des résultats (Abstract)	-	-	-

Textes saisis

Catégorie	Texte
Description succincte (Anglais)	Ion Assisted Sputter Deposition of high precision multilayer coatings for UV optics
Résumé des résultats (Abstract) (Anglais)	In a close collaboration with Unaxis Optics, the novel (patented) Optima coating process ¿ an ion assisted sputter deposition process ¿ is adapted for the production of precise multilayer coatings for UV optics and EUV 3.4nm) mirror applications. The production of such multilayer stacks requires a rigorous process control, concerning layer thickness uniformity, interface roughness, process stability as well as reproducibility. The fabrication and optimization process of UV and EUV coatings goes along with characterization steps, involving various analytics like HR-TEM, AFM, X-ray analytics, RBS as well as UV and EUV reflection measurements and tests of laser induced damage.

Catégorie

Texte

Description succincte
(Anglais)

Ion Assisted Sputter Deposition of high precision multilayer coatings for UV optics

Résumé des résultats (Abstract)
(Anglais)

In a close collaboration with Unaxis Optics, the novel (patented) Optima coating process ¿ an ion assisted sputter deposition process ¿ is adapted for the production of precise multilayer coatings for UV optics and EUV 3.4nm) mirror applications. The production of such multilayer stacks requires a rigorous process control, concerning layer thickness uniformity, interface roughness, process stability as well as reproducibility. The fabrication and optimization process of UV and EUV coatings goes along with characterization steps, involving various analytics like HR-TEM, AFM, X-ray analytics, RBS as well as UV and EUV reflection measurements and tests of laser induced damage.