Feasibility Study: Sapphire Membranes for Pressure Sensors

Fonte Standard Gras
Identifiant

Unité de recherche

INNOSUISSE

Numéro de projet

7296.1;2 EPRP-IW

Titre du projet

Feasibility Study: Sapphire Membranes for Pressure Sensors

Titre du projet anglais

Feasibility Study: Sapphire Membranes for Pressure Sensors

Textes relatifs à ce projet

	Allemand	Français	Italien	Anglais
Description succincte	-	-	-
Résumé des résultats (Abstract)	-	-	-

Textes saisis

Catégorie	Texte
Description succincte (Anglais)	Feasibility Study: Sapphire Membranes for Pressure Sensors
Résumé des résultats (Abstract) (Anglais)	Inficon AG initiated the feasibility study ¿ Sapphire Membranes for Pressure Sensors - to evaluate novel band drawn sapphire membranes for future pressure sensor applications. The current pressure sensor design uses Al2O3 membranes. Inficon encounters handicaps concerning production yield, contamination resistance and universality with respect to the measurement range, due to geometrical limitation in thin Al2O3 membrane manufacturing. The expected benefits of sapphire are manifold. To investigate the physical performance of such membranes, various aspects of material and membrane structure have to be studied. The objective of the current project therefore is an extensive study and test of the applicability of sapphire membranes for pressure sensor applications.

Catégorie

Texte

Description succincte
(Anglais)

Feasibility Study: Sapphire Membranes for Pressure Sensors

Résumé des résultats (Abstract)
(Anglais)

Inficon AG initiated the feasibility study ¿ Sapphire Membranes for Pressure Sensors - to evaluate novel band drawn sapphire membranes for future pressure sensor applications. The current pressure sensor design uses Al2O3 membranes. Inficon encounters handicaps concerning production yield, contamination resistance and universality with respect to the measurement range, due to geometrical limitation in thin Al2O3 membrane manufacturing. The expected benefits of sapphire are manifold. To investigate the physical performance of such membranes, various aspects of material and membrane structure have to be studied. The objective of the current project therefore is an extensive study and test of the applicability of sapphire membranes for pressure sensor applications.