Nanosize ferroelectric structures via chemical solution routes

• Research unit: COST
• Project number: C01.0066

Key words (English)

Ferroelectric thin films; selective growth; e-beam lithography

Research programs (English)

COST-Action 528 - Chemical Solution Deposition on Thin Films

Short description (English)

See abstract

Partners and International Organizations (English)

AT, BE, CZ, FI, FR, DE, HU, IE, IT, LT, PT, RO, CS, SK, SI, ES, CH, UK

Abstract (English)

Triangular (111) and square-shaped (100)-oriented Pb( Zr,Ti) O3 (PZT) single crystallites with lateral dimensions down to 50 nm and thickness of 20 nm have been grown using lithography-modulated self-assembly. Epitaxial (111)-oriented Pt on a SrTiO3 single crystal served assubstrate. Site-selectivity was achieved using affinity spots obtained from an epitaxial 2 nm thick rutile TiO2 film that was patterned by e-beam lithography. TiO2 attaches PbO from the PZT process and provokes quick nucleation of the perovskite, whereas on bare Pt outside the spots PbO is rather reevaporating than reacting. The spot patterns have been fabricated by positive PMMA resist in combination with pattern inversion by a lift-off hard mask, and alternatively by using a negative resist serving at the same time as mask for the dry etching process of TiO2.

References in databases (English)

Swiss Database: COST-DB of the State Secretariat for Education and Research Hallwylstrasse 4 CH-3003 Berne, Switzerland Tel. [phone] Swiss Project-Number: C01.0066