Miniaturized silicon piezoresitive inclinometer

• Unité de recherche: INNOSUISSE
• Numéro de projet: 6814.1;5 NMS-NM
• Titre du projet anglais: Miniaturized silicon piezoresitive inclinometer

Description succincte (Anglais)

Miniaturized silicon piezoresitive inclinometer

Description succincte (Français)

Miniaturized silicon piezoresitive inclinometer

Résumé des résultats (Abstract) (Anglais)

The goal of this project is to develop a miniaturized piezoresistive silicon tilt sensor (inclinometer) capable of measuring angles up to 45° with an accuracy of 0.2°. The fabrication process will combine the know-how in piezoresistive sensor technology of Intersema Sensoric SA and in Deep reactive Ion Etching (DRIE) of IMT in order to meet the requirements of small size, low cost and high accuracy of the watch indutry.