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Research unit
INNOSUISSE
Project number
6814.1;5 NMS-NM
Project title
Miniaturized silicon piezoresitive inclinometer

Texts for this project
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Short description
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Abstract
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CategoryText
Short description
(English)
Miniaturized silicon piezoresitive inclinometer
Short description
(French)
Miniaturized silicon piezoresitive inclinometer
Abstract
(English)
The goal of this project is to develop a miniaturized piezoresistive silicon tilt sensor (inclinometer) capable of measuring angles up to 45° with an accuracy of 0.2°. The fabrication process will combine the know-how in piezoresistive sensor technology of Intersema Sensoric SA and in Deep reactive Ion Etching (DRIE) of IMT in order to meet the requirements of small size, low cost and high accuracy of the watch indutry.