Improvement of Semiconductor Process Simulator by Atomistic Simulation Techniques (MOLDYN)

Research unit

INNOSUISSE

Project number

5779.2;3 TNS-NM

Project title

Improvement of Semiconductor Process Simulator by Atomistic Simulation Techniques (MOLDYN)

Texts for this project

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Short description (German)	Improvement of Semiconductor Process Simulator by Atomistic Simulation Techniques (MOLDYN)