EMERGE: Multi-electrode setup fabrication for micro machining applications using LIGA technology - mini-press setup and direct electrode fabrication

• Research unit: EU RFP
• Project number: 00.0327

Key words (English)

Liga; wire electrodischarge machining; multiple electrode setups; electro chemical machining

Alternative project number (English)

EU project number: HPRI-1999-00023

Research programs (English)

EU-programme: 5. Frame Research Programme - 4.2 Agriculture and agroindustry

Short description (English)

See abstract

Partners and International Organizations (English)

Coordinator: Institut für Mikrotechnik, Mainz (D)

Abstract (English)

MICRO ELECTRODE FABRICATION USING LIGA TECHNOLOGY OR WIRE ELECTRIC DISCHARGE MACHINING TECHNOLOGY IS STUDIED FOR THE APPLICATION OF 3D MICROSTRUCTURING. RESEARCHED IS THE MICRO ELECTROCHEMICAL MACHINING (ECM) OF CONDUCTIVE MATERIALS AS COPPER OR TITANIUM, AND THE SPARK ASSISTED CHEMICAL ETCHING OF GLASS MATERIALS USING MULTIPLE ELECTRODE SETUPS.
IN THESE APPLICATIONS, MICRO ELECTRODE FABRICATION IN LARGER BATCH QUANTITIES IS IMPORTANT TO IMPROVE INDUSTRIAL THROUGHPUT.
IMM IN MAINZ (GERMANY) WILL PROVIDE THE SERVICE OF ELECTRODE FABRICATION OF A SET OF MINIATURE ELECTRODES ON A WAFER USING LIGA (WITH EXISTING MASK) OR USING WIRE ELECTRODISCHARGE MACHINING.
EPFL IN LAUSANNE (SWITZERLAND) IS RESEARCHING PROCESSES AS SPARK ASSISTED ETCHING FOR THE MICROSTRUCTURING OF GLASS (SNSF PROJECT) AND MICRO ELECTROCHEMICAL ETCHING OF CONDUCTIVE MATERIALS (EPFL PROJECT).
MICROSTRUCTURING WITH MULTIPLE ELECTRODE SETUPS IS STUDIED AND COMPARED WITH SINGLE TOOL ELECTRODE MICROSTRUCTURING. A VISION SYSTEM (MICROSCOPE, DIGITAL CAMERA AND PARTLY SELF-DEVELOPED SOFTWARE) WAS INSTALLED FOR FEEDBACK PURPOSES. THIS WAS DONE AS PART OF A STUDENT'S SEMESTER PROJECT.

References in databases (English)

Swiss Database: Euro-DB of the
State Secretariat for Education and Research
Hallwylstrasse 4
CH-3003 Berne, Switzerland
Tel. [phone]
Swiss Project-Number: 00.0327