3-D touch with 5 nm resolution and 20 nm repeatability for coordinate measuring machines

Research unit

INNOSUISSE

Project number

5393.1;5 TNS-NM

Project title

3-D touch with 5 nm resolution and 20 nm repeatability for coordinate measuring machines

Texts for this project

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Short description (English)	3-D touch with 5 nm resolution and 20 nm repeatability for coordinate measuring machines