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Research unit
INNOSUISSE
Project number
2803.1;1 MIE
Project title
M2S2 Laborverbund: Procédés électrochimiques et structuration de photorésists épais
Project status Finished
 
Start date 01.10.1994
End date 01.04.1996
 
Granted total costs 258'000.00  CHF
Section 8 Microelectronics
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % Not yet defined

Last modification of the project
27.11.2014