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Research unit
INNOSUISSE
Project number
2483.1;1 MIE
Project title
Laborverbund Mikromechanik auf Silizium in der Schweiz, M2S2
Project status Finished
 
Start date 01.08.1992
End date 02.03.1998
 
Granted total costs 657'000.00  CHF
Section 8 Microelectronics
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % Not yet defined
Last modification of the project
27.11.2014