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Research unit
INNOSUISSE
Project number
47487.1 IP-ENG
Project title
Intelligent Control of Evaporation process systems # rate, uniformity, layer properties applying modern methods of data analytics
Project status Finished
 
Start date 01.09.2020
End date 01.06.2023
 
Granted total costs 494'633.00  CHF
Section 70 Engineering
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T130 Production technology
Last modification of the project