Research unit
Project number
44215.1 IP-ENG
Project title
MEMS-basierte Nanoindentation
Project status In Process
Start date 01.06.2020
End date 01.02.2022
Granted total costs 833'594.88  CHF
Section 70 Engineering
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
Research disciplines
100 % T171 Microelectronics

Last modification of the project