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Research unit
SERI
Project number
17.00101
Project title
3D Advanced Metrology and materials for advanced devices
Project status Finished
 
Start date 01.04.2016
End date 09.12.2019
 
Granted total costs 234'191.00  CHF
Section EU Framework Programmes EURA
Research type Applied research and development
NABS classification Foreign relationships
 
Research disciplines
100 % Not related to a specific discipline
Last modification of the project