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Research unit
SERI
Project number
15.0208
Project title
Metrology for manufacturing 3D stacked integrated circuits
Project status Finished
 
Start date 01.06.2015
End date 17.12.2018
 
Granted total costs 298'931.00  CHF
Section EU Framework Programmes EURA
Research type Applied research and development
NABS classification Foreign relationships
 
Research disciplines
100 % Not related to a specific discipline
Last modification of the project