Research unit
Project number
25716.2 PFNM-NM
Project title
High-temperature pressure sensor with metal oxynitride thin film system (HTMOS)
Project status Finished
Start date 01.06.2017
End date 01.01.2019
Granted total costs 172'769.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
Research disciplines
100 % T171 Microelectronics

Last modification of the project