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Research unit
INNOSUISSE
Project number
25592.1 PFNM-NM
Project title
HighIon: High ion generation, transmission and detection through a high duty-cycle and high energy acceptance time-of-flight analyser for secondary ion mass spectrometry (SIMS) applications and improvement of a caesium evaporator for SIMS
Project status Finished
 
Start date 01.05.2017
End date 01.09.2021
 
Granted total costs 929'059.25  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project