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Research unit
METAS
Project number
F-5111.30075
Project title
15SIB09 3DNano: Traceable three-dimensional nanometrology
Project status Finished
 
Start date 01.10.2016
End date 30.09.2019
 
Section 5111 Length, Nano- and Micro-technology
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % P180 Metrology, physical instrumentation
Last modification of the project
30.04.2020