Project status
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Finished
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Start date
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01.01.2015
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End date
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30.06.2018
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Section
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5111 Length, Nano- and Micro-technology
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Research type
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Applied research and development
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NABS classification
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Industrial production and technology
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Research disciplines
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100
%
P180 Metrology, physical instrumentation
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Last modification of the project
04.03.2019
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