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Research unit
INNOSUISSE
Project number
13254.1;6 PFFLM-NM
Project title
Advanced Mask Aligner Lithography (AMALITH)
Project status Finished
 
Start date 01.01.2012
End date 12.03.2014
 
Granted total costs 551'402.00  CHF
Section 5 CTI
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % Not yet defined
Last modification of the project
27.11.2014