ServicenavigationHauptnavigationTrailKarteikarten

Research unit
INNOSUISSE
Project number
12596.2;6 PFNM-NM
Project title
Mechanical Micro Metrology System (MMMS) for the Investigation and Quality Control of Micron Sized Objects
Project status Finished
 
Start date 01.08.2011
End date 29.06.2014
 
Granted total costs 702'338.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
27.11.2014