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Research unit
INNOSUISSE
Project number
11256.2;4 PFNM-NM
Project title
Software for optimal process design for vapour deposition
Project status Finished
 
Start date 01.05.2010
End date 28.12.2012
 
Granted total costs 309'100.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
27.11.2014